Kazue Shingu

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 11:30 AM C17 (Training Room 2)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[6a-C17-1~8] 13.8 Compound and power electron devices and process technology

10:15 AM - 10:30 AM

[6a-C17-4] Evaluation of crystal damage in Mg-implanted GaN by RBS

〇Kazue Shingu¹, Kazuteru Takahashi¹, Daniel Tseng², Tohru Nakamura³, Kiyoji Ikeda³, Tomoaki Nishimura³, Tomoyoshi Mishima³ (1.Nano Science, 2.EAG, 3.Hosei Univ.)

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