Kazuteru Takahashi

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 11:30 AM C17 (Training Room 2)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[6a-C17-1~8] 13.8 Compound and power electron devices and process technology

10:30 AM - 10:45 AM

[6a-C17-5] Evaluation of crystal damage in Mg-implanted GaN by TEM

〇Kazuteru Takahashi¹, Kazue Shingu¹, Udit Sharma², Toru Nakamura³, Kiyoji Ikeda³, Nishimura Tomoaki³, Tomoyoshi Mishima³ (1.Nano Science Corp., 2.EAG, Inc., 3.Hosei Univ.)

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