Kiyotaka Nakano

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 11:30 AM C17 (Training Room 2)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[6a-C17-1~8] 13.8 Compound and power electron devices and process technology

11:00 AM - 11:15 AM

[6a-C17-7] High Sensitivity Observation of Dopant Concentration in GaN semiconductor by Phase-Shifting Electron Holography

〇Kiyotaka Nakano¹, Miko Matsumoto¹, Satoshi Anada¹, Kazuo Yamamoto¹, Yuto Ando², Masaya Ogura², Si-Young Bae², Atsushi Tanaka², Yoshio Honda², Yukari Ishikawa¹, Hiroshi Amano², Tsukasa Hirayama¹ (1.JFCC, 2.Nagoya Univ.)

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