Susumu Horita

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:30 AM - 11:30 AM PA9 (P)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[6a-PA9-1~11] 13.3 Insulator technology

9:30 AM - 11:30 AM

[6a-PA9-4] Trichloroethene Effect on Redaction in Residual OH Content in Low-Temperature Si Oxide Films Produced by APCVD with Organic Silicon Gas Source

〇Susumu Horita¹, Jain Puneet¹ (1.Japan Adv. Ins. Sci & Tech.)