Hiroaki Kawashima

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:30 AM - 11:30 AM PA9 (P)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[6a-PA9-1~11] 13.3 Insulator technology

9:30 AM - 11:30 AM

[6a-PA9-6] Step coverage of hafnium oxide thin films by supercritical fluid deposition

〇Hiroaki Kawashima¹, Hiroshi Uchida¹ (1.Sophia Univ.)