Susumu Tsukimoto

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:30 PM - 7:00 PM A201 (201)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[6p-A201-1~20] 15.6 Group IV Compound Semiconductors (SiC)

3:00 PM - 3:15 PM

[6p-A201-7] Analyses of grinding-induced strain distribution and microstructure in SiC wafer by combining EBSD-Wilkinson and TEM techniques

〇Susumu Tsukimoto^1,2, Tatsuhiko Ise^1,3, Satoshi Segawa^1,3, Genta Maruyama², Satoshi Hashimoto², Tsuguo Sakurada², Junji Senzaki¹, Tomohisa Kato¹, Kazutoshi Kojima¹, Hajime Okumura¹ (1.AIST, 2.JFE Techno-Research, 3.Asahi Diamond)

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