Satoko Nakagawa

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 5:00 PM A503 (503)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal evaluation, impurities and crystal defects

[6p-A503-1~12] 15.7 Crystal evaluation, impurities and crystal defects

1:45 PM - 2:00 PM

[6p-A503-1] Impact of electron dose for analysis on carbon concentration in silicon crystal using photoluminescence spectroscopy after electron irradiation via luminescence activation

〇Satoko Nakagawa¹, Yuta Nagai¹ (1.GWJ)