Naohisa Inoue

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 5:00 PM A503 (503)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal evaluation, impurities and crystal defects

[6p-A503-1~12] 15.7 Crystal evaluation, impurities and crystal defects

3:45 PM - 4:00 PM

[6p-A503-8] Measurement of carbon concentration in silicon crystal(XI)Fabrication of reference sample and block gauge down to 10¹³cm^-3

〇Naohisa Inoue^1,2, Yuichi Kawamura² (1.Tokyo Univ. Agri. & Technol., 2.Osaka Pref. Univ.)

4:00 PM - 4:15 PM

[6p-A503-9] Measurement of carbon concentration in silicon crystal (XII) Detection of 10¹³ cm^-3

〇Naohisa Inoue¹ (1.Tokyo Univ. Agri. & Technol.)

4:15 PM - 4:30 PM

[6p-A503-10] Measurement of carbon concentration in silicon crystal (XIII) Network and use for production down to 10¹³ cm^-3

〇Naohisa Inoue^1,2, Yuichi Kawamura² (1.Tokyo Univ. Agri. & Technol., 2.Osaka Pref. Univ.)