Yukihiro Ikeda

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 7:15 PM C16 (Training Room 1)

Symposium (Oral)
| Symposium
| Latest Application Researches and Future Prospects of Functional Atomic Layers

[6p-C16-1~17] Latest Application Researches and Future Prospects of Functional Atomic Layers

6:45 PM - 7:00 PM

[6p-C16-16] Thin film growth of tungsten disulfide by ALD using liquid precursors

〇Yukihiro Ikeda¹, Keiji Ueno¹ (1.Saitama Univ.)