Tatsunori Isobe

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 5:45 PM C17 (Training Room 2)

Oral presentation
| 21 Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[6p-C17-1~15] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:15 PM - 4:30 PM

[6p-C17-10] Characteristics of Al₂O₃ Films Deposited with Additional Gas

〇Tatsunori Isobe¹, Akira Taki¹, Masashi Senaha¹, Makoto Arai¹, Junya Kiyota¹ (1.ULVAC)