Yasuo Cho

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 5:30 PM C19 (C19)

Symposium (Oral)
| Symposium
| Nanoscale 3D analyses for new device and materials development

[6p-C19-1~8] Nanoscale 3D analyses for new device and materials development

2:45 PM - 3:15 PM

[6p-C19-3] Development of Local DLTS Based on Super-Higher-Order Scanning Nonlinear Dielectric Microscopy and Its Application to MOS Interface Characterization

Norimichi Chinone¹, 〇Yasuo Cho¹ (1.Tohoku Univ.)