4:45 PM - 5:00 PM [6p-C19-7] Development of Site-specific FIB Specimen Preparation Techniques with Positioning Precision in Sub 10nm for STEM/TEM Analysis of Nanoscale 3D Devices 〇Kei Watanabe1, Amika Shima1, Yutaka Fukushima1 (1.Toshiba Nanoanalysis Corp.)