Toshio Seki

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:30 PM - 4:15 PM S41 (Conf. Room 1)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[6p-S41-1~10] 7.5 Ion beams

3:30 PM - 3:45 PM

[6p-S41-8] Surface structure after etching with ClF₃ neutral cluster

〇Toshio Seki¹, Tadashi Shojo², Kunihiko Koike², Takaaki Aoki³, Jiro Matsuo¹ (1.Graduate School of Engineering, Kyoto Univ., 2.Iwatani Corp., 3.ACCMS, Kyoto Univ.)