shogo okuyama

→ Search for shogo okuyama in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 11:00 AM A201 (201)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[7a-A201-1~8] 15.6 Group IV Compound Semiconductors (SiC)

9:30 AM - 9:45 AM

[7a-A201-3] Surface morphology of 4H - SiC wafer after etching using ClF₃ gas

〇shogo okuyama¹, Hitoshi Habuka¹, Yoshinao Takahasi², Tomohisa Kato³ (1.Yokohama Nat. Univ., 2.Kanto Denka Kogyo, 3.AIST)