Masanori Shirai

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 12:00 PM A301 (Main Hall)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[7a-A301-1~11] 15.4 III-V-group nitride crystals

11:45 AM - 12:00 PM

[7a-A301-11] GaN deposition by reactive sputtering with N^* radical source

〇Masanori Shirai¹, Takuji Yamamoto¹, Satoru Takasawa¹, Satoru Ishibashi¹ (1.ULVAC,Inc.)