Kazuki Yagi

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 12:30 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[7a-C21-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:15 AM - 9:30 AM

[7a-C21-2] Effects of Film Thickness on Solid-Phase Crystallization of SiSn/Insulator at Low-Temperature

〇Kazuki Yagi¹, Hongmiao Gao², Takayuki Sugino², Masanobu Miyao², Taizo Sadoh² (1.Kyushu Univ. EECS, 2.Kyushu Univ. ISE)