Shuhei Nakayama

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:30 AM - 11:30 AM PA6 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[7a-PA6-1~14] 6.1 Ferroelectric thin films

9:30 AM - 11:30 AM

[7a-PA6-1] Effect of heat-treatment condition on crystallization behavior of HfO₂-ZrO₂ thin film

〇Shuhei Nakayama¹, Funakubo Hiroshi², Uchida Hiroshi¹ (1.Sophia Univ., 2.Tokyo Tech.)