FUMIMASA HORIKIRI

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 12:00 PM S22 (Palace B)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[7a-S22-1~11] 13.8 Compound and power electron devices and process technology

9:00 AM - 9:15 AM

[7a-S22-1] Nondestructive measurement of a homo-epitaxial grown GaN film thickness using FT-IR

〇FUMIMASA HORIKIRI¹, YOSHINOBU NARITA¹, TAKEHIRO YOSHIDA¹ (1.Sciocs Co. Ltd.)