Shiyu Xiao

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:15 PM - 6:45 PM A301 (Main Hall)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[7p-A301-1~20] 15.4 III-V-group nitride crystals

2:30 PM - 2:45 PM

▲ [7p-A301-6] Investigation of high-temperature annealing process of sputtered AlN films

〇Shiyu Xiao¹, Yikang Liu², Ryoya Suzuki², Hideto Miyake^1,2, Kazumasa Hiramatsu², Shunta Harada³, Toru Ujihara³ (1.Mie Univ. Grad. Scl. of RIS, 2.Mie Univ. Grad. Scl . of Eng, 3.Nagoya Univ.)

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