Taisei Motomura

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 3:00 PM - 7:30 PM A402 (402+403)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma deposition of thin film and surface treatment

[7p-A402-7~23] 8.3 Plasma deposition of thin film and surface treatment

5:30 PM - 5:45 PM

△ [7p-A402-16] High-density convergent plasma sputtering device for liquid metal target

〇Taisei Motomura¹, Tatsuo Tabaru¹ (1.AIST)