Setsuo Nakao

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 3:00 PM - 7:30 PM A402 (402+403)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma deposition of thin film and surface treatment

[7p-A402-7~23] 8.3 Plasma deposition of thin film and surface treatment

3:00 PM - 3:15 PM

[7p-A402-7] Preparation of TiCN films by reactive HPPS with two facing targets

Toshihiko Mishima¹, Ryo Yoshida¹, 〇Setsuo Nakao², Kingo Azuma³, Takashi Kimura¹ (1.NIT, 2.AIST, 3.UH)