Shoma Hazaka

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:30 PM - 4:45 PM A412 (412)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[7p-A412-1~12] 6.2 Carbon-based thin films

4:15 PM - 4:30 PM

[7p-A412-11] XPS study of HMDS-introduced CVD camphoric carbon thin films

〇Shoma Hazaka¹, Kenta Nishimura¹, Tsubasa Shibuya¹, Hiroyasu Ishikawa^1,2 (1.Shibaura Inst. Tech., 2.SIT RC Green Innov.)