Shinichi Matsubara

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:45 PM - 6:00 PM C13 (office 2-2)

Symposium (Oral)
| Symposium
| Recent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices

[7p-C13-1~9] Recent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices

4:30 PM - 5:00 PM

▲ [7p-C13-7] Development of scanning ion microscope with H₃⁺ gas field ionization ion source

〇Shinichi Matsubara¹, Hiroyasu Shichi¹, Tomihiro Hashizume¹ (1.Hitachi, Ltd., Research & Development Group)