Kazuya Saito

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:30 PM - 6:30 PM C18 (C18)

Symposium (Oral)
| Symposium
| Film Formation and Low Temperature of IV Element Semiconductor

[7p-C18-1~11] Film Formation and Low Temperature of IV Element Semiconductor

3:30 PM - 4:00 PM

[7p-C18-5] Process Technology of Chemical Vapoer Deposition for LTPS

〇Kazuya Saito¹ (1.ULVAC Inc.)