Takio Kizu

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:45 PM - 7:30 PM C23 (C23)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[7p-C23-1~22] 6.4 Thin films and New materials

2:00 PM - 2:15 PM

[7p-C23-2] High mobility InOx Thin-film Transistors prepared by Atomic Layer Deposition

〇Takio Kizu¹, Shinya Aikawa^1,2, Yukihiro Ikeda³, Keiji Ueno³, Toshihide Nabatame¹, Kazuhito Tsukagoshi¹ (1.NIMS, 2.Kogakuin Univ., 3.Saitama Univ.)