Masayuki Kawakami

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PB3 (P)

Poster presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[7p-PB3-1~6] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

1:30 PM - 3:30 PM

[7p-PB3-6] Study of charge up after single wafer wet processing

〇Masayuki Kawakami¹, Daisaku Yano¹, Koji Yamanaka¹, Hiroyuki Araki², Katsuhiko Miya³, Masanori Suzuki⁴, Nobuo Kawase⁵ (1.Organo corp., 2.SCREEN Semiconductor Solutions Co., 3.SCREEN Holdings Co., 4.Techno Ryowa Ltd., 5.JoyNTech)

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