Satoshi Matsuno

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PB4 (P)

Poster presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[7p-PB4-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

1:30 PM - 3:30 PM

[7p-PB4-8] Preparation of BaSi₂ thin-films on Si (111) by helicon-wave-plasma sputtering

〇Satoshi Matsuno¹, Ryota takabe¹, Kaoru Toko¹, Takashi suemasu^1,2 (1.Univ. tsukuba, 2.JST-CREST)