Naoki Murakoso

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:00 AM - 12:15 PM C11 (Office 1)

Oral presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[8a-C11-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

9:00 AM - 9:15 AM

[8a-C11-1] Investigation of Si/Fe composition in β-FeSi₂ epitaxial films by spectroscopic ellipsometry

〇Naoki Murakoso¹, Hirofumi Hoshida¹, Motoki Iinuma¹, Hajime Eguchi¹, Yoshikazu Terai¹ (1.Kyushu Inst. of Tech.)