Kazuhiro Kanda

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA1 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[8a-PA1-1~17] 6.2 Carbon-based thin films

9:30 AM - 11:30 AM

[8a-PA1-11] Modification process of fluorinated DLC film by the irradiation of soft X-rays

〇Kazuhiro Kanda¹, Hiroki Takamatsu¹, Eri Miura-Fujisawa², Hiroki Akasaka³, Akihiro Saiga⁴, Koji Tamada⁴ (1.LASTI, Univ. Hyogo, 2.School Eng., Univ. Hyogo., 3.Tokyo Inst. Tech., 4.Tokyo College)

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