Shungo Tanimoto

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA2 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[8a-PA2-1~17] 6.4 Thin films and New materials

9:30 AM - 11:30 AM

[8a-PA2-5] Electrical Characteristics and Crystal Structure for MoSi₂-Si Composite Thin Films
Deposited by rf Magnetron Sputtering

〇Shungo Tanimoto¹, Kosuke Shimozono¹, Yuuki Sato¹, Tadashi Ohachi¹, Shinzo Yoshikado¹ (1.Doshisha Univ.)