Ryusei Segawa

→ Search for Ryusei Segawa in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA2 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[8a-PA2-1~17] 6.4 Thin films and New materials

9:30 AM - 11:30 AM

[8a-PA2-8] Integration effect of O₂ plasma to excimar-laser assisted MOD process

〇(M2)Ryusei Segawa¹, Masami Nishikawa¹, Tomohiko Nakajima², Tetsuo Tsuchiya², Nobuo Saitou¹, Takayuki Ishibashi¹ (1.Nagaoka Univ., 2.AIST)