Masanori Shinohara

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PB3 (P)

Poster presentation
| 8 Plasma Electronics
| 8.2 Plasma measurements and diagnostics

[8a-PB3-1~8] 8.2 Plasma measurements and diagnostics

9:30 AM - 11:30 AM

[8a-PB3-2] IR Absorption Spectroscopy of Deposition Reaction due to Hydrocarbon Plasmas

〇Masanori Shinohara¹, Takeshi Ihara¹, Yoshihito Yagyu¹, Tamiko Oshima¹, Hitoharu Kawasaki¹ (1.NIT Sasebo College)