Taojun Fang

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PB5 (P)

Poster presentation
| 8 Plasma Electronics
| 8.8 Plasma Electronics English Session

[8a-PB5-1~3] 8.8 Plasma Electronics English Session

9:30 AM - 11:30 AM

▼ [8a-PB5-3] Effects of gas pressure on the surface morphology of a-C:H films
deposited using Ar + H₂+ C₇H₈ plasma CVD

〇Taojun Fang¹, Kenji Yamaki¹, Kazunori Koga¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Naho Itagaki¹, Masaharu Shiratani¹ (1.Kyushu University)