Nobue Araki

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 1:15 PM - 4:00 PM A411 (411)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[8p-A411-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

1:45 PM - 2:00 PM

[8p-A411-3] Influence of Cleanroom Air for Surface Recombination Changing on the
Hydrogen-Terminated Silicon Observed by μ-PCD Lifetime Measurement

〇Nobue Araki^1,2, Hiromi Hidaka¹, Moriya Miyashita¹, Haruhiko Udono² (1.GlobalWafers Japan Co., Ltd., 2.Ibaraki Univ.)