Miya Matsuo

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 1:15 PM - 4:00 PM A411 (411)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[8p-A411-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

3:30 PM - 3:45 PM

[8p-A411-9] Water Flow Recirculation Control in Batch-Type Silicon Wafer Wet Cleaner

Kento Miyazaki¹, 〇Miya Matsuo¹, Shogo Okuyama¹, Hitoshi Habuka¹, Akihiro Goto² (1.Yokohama Nat. Univ., 2.Pre-Tech)