Yukiko Daigo

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 1:30 PM - 3:30 PM PA2 (P)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8p-PA2-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

[8p-PA2-1] Development of Atomic Resolution Atom Probe-STEM Correlative Technique

〇Yukiko Daigo¹, Hiroki Tanaka², Harumi Seki², Riichiro Takaishi², Amika Shima¹, Norihito Mayama¹, Tomokazu Sasaki¹, Yutaka Fukushima¹ (1.Toshiba Nanoanalysis Corp., 2.Toshiba Corp.)

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