Masato Koyama(TOSHIBA), Tomihiro Hashizume(Hitachi, Ltd.)
Masato Koyama
Chairperson, etc.
Wed. Sep 6, 2017 1:45 PM - 5:30 PM C19 (C19)
- Symposium (Oral)
- | Symposium
- | Nanoscale 3D analyses for new device and materials development
Tue. Sep 5, 2017 9:00 AM - 12:00 PM C11 (Office 1)
- Oral presentation
- | 13 Semiconductors
- | 13.3 Insulator technology
[5a-C11-1~11] 13.3 Insulator technology
6.1と13.3と13.5のコードシェアセッションあり
Masato Koyama(TOSHIBA), Akio Ohta(Nagoya Univ.)