The 78th JSAP Autumn Meeting, 2017

Yasushi Inoue

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Chairperson, etc.

Thu. Sep 7, 2017 3:00 PM - 7:30 PM A402 (402+403)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.3 Plasma deposition of thin film and surface treatment

[7p-A402-7~23] 8.3 Plasma deposition of thin film and surface treatment

Yasushi Inoue(Chiba Inst. of Tech.), Yasunori Ohtsu(Saga Univ.)