Takashi Noguchi(Univ. of the Ryukyus), Naoto Matsuo(Univ. of Hyogo), Seiichiro Higashi(Hiroshima Univ.)
Takashi Noguchi
Chairperson, etc.
Thu. Sep 7, 2017 1:30 PM - 6:30 PM C18 (C18)
- Symposium (Oral)
- | Symposium
- | Film Formation and Low Temperature of IV Element Semiconductor
Thu. Sep 7, 2017 9:00 AM - 12:30 PM C21 (C21)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Takashi Noguchi(Univ. of the Ryukyus), Taizoh Sadoh(Kyushu Univ.)