[6a-PA8-1~4] 7.5 Ion beams

Wed. Sep 6, 2017 9:30 AM - 11:30 AM PA8 (P)

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9:30 AM - 11:30 AM

[6a-PA8-1] Thickness of Cs layer on the plasma grid of H^- ion source operated with deuterium

〇Motoi Wada¹, Takahiro Kenmotsu², Mamiko Sasao³, Katsuyoshi Tsumori⁴ (1.Sch. Sci. Eng. Doshisha Univ., 2.L&M Sci. Doshisha Univ., 3.R&D Prmot. Doshisha Univ., 4.NIFS)

9:30 AM - 11:30 AM

[6a-PA8-2] Local structure analysis of Mg ion implanted Si

Yuki Kobayasih¹, 〇Muneyuki Naito¹, C Bachelet², J Bourcois² (1.Konan Univ., 2.CSNSM)

9:30 AM - 11:30 AM

[6a-PA8-3] Low-Energy Organic Silicon Molecular Ion Beam Production for SiC Film Formation

〇Satoru Yoshimura¹, Satoshi Sugimoto¹, Takae Takeuchi³, Masato Kiuchi^1,2 (1.Osaka Univ., 2.AIST, 3.Nara Women Univ.)

9:30 AM - 11:30 AM

[6a-PA8-4] Cu Thin Film Formation by Electron Beam Irradiation
on Ionic Liquid EMIM-DCA Solution with CuCl

〇Yuma Higashiura¹, Mitsuaki Takeuchi¹, Hiromichi Ryuto¹ (1.Kyoto Univ.)

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Session information

[6a-PA8-1~4] 7.5 Ion beams

[6a-PA8-1] Thickness of Cs layer on the plasma grid of H- ion source operated with deuterium

[6a-PA8-2] Local structure analysis of Mg ion implanted Si

[6a-PA8-3] Low-Energy Organic Silicon Molecular Ion Beam Production for SiC Film Formation

[6a-PA8-4] Cu Thin Film Formation by Electron Beam Irradiationon Ionic Liquid EMIM-DCA Solution with CuCl

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[6a-PA8-1] Thickness of Cs layer on the plasma grid of H^- ion source operated with deuterium

[6a-PA8-4] Cu Thin Film Formation by Electron Beam Irradiation
on Ionic Liquid EMIM-DCA Solution with CuCl