Satoru Yoshimura

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:30 AM - 11:30 AM PA8 (P)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[6a-PA8-1~4] 7.5 Ion beams

9:30 AM - 11:30 AM

[6a-PA8-3] Low-Energy Organic Silicon Molecular Ion Beam Production for SiC Film Formation

〇Satoru Yoshimura¹, Satoshi Sugimoto¹, Takae Takeuchi³, Masato Kiuchi^1,2 (1.Osaka Univ., 2.AIST, 3.Nara Women Univ.)