[8a-PB5-1~3] 8.8 Plasma Electronics English Session

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PB5 (P)

△：奨励賞エントリー
▲：英語発表
▼：奨励賞エントリーかつ英語発表
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9:30 AM - 11:30 AM

▲ [8a-PB5-1] 2.45 GHz Microwave-induced Sheet Plasma Source

〇(DC)ArnoldRey Burgos Gines¹, Berverly Anne Suarez¹, Motoi Wada¹ (1.Doshisha Univ.)

9:30 AM - 11:30 AM

▲ [8a-PB5-2] Measurement Electron Density of Atmospheric Pressure Plasma by Mach-Zehnder Interferometer using CO₂ and He-Ne Laser

〇Takafumi Yamada¹, Makoto Matsui¹ (1.Shizuoka Univ.)

9:30 AM - 11:30 AM

▼ [8a-PB5-3] Effects of gas pressure on the surface morphology of a-C:H films
deposited using Ar + H₂+ C₇H₈ plasma CVD

〇Taojun Fang¹, Kenji Yamaki¹, Kazunori Koga¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Naho Itagaki¹, Masaharu Shiratani¹ (1.Kyushu University)

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Session information

[8a-PB5-1~3] 8.8 Plasma Electronics English Session

▲ [8a-PB5-1] 2.45 GHz Microwave-induced Sheet Plasma Source

▲ [8a-PB5-2] Measurement Electron Density of Atmospheric Pressure Plasma by Mach-Zehnder Interferometer using CO2 and He-Ne Laser

▼ [8a-PB5-3] Effects of gas pressure on the surface morphology of a-C:H filmsdeposited using Ar + H2+ C7H8 plasma CVD

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▲ [8a-PB5-2] Measurement Electron Density of Atmospheric Pressure Plasma by Mach-Zehnder Interferometer using CO₂ and He-Ne Laser

▼ [8a-PB5-3] Effects of gas pressure on the surface morphology of a-C:H films
deposited using Ar + H₂+ C₇H₈ plasma CVD