[5a-A204-1~11] 16.3 Bulk, thin-film and other silicon-based solar cells

△ [5a-A204-9] Evaluation of surface potential of Si with SiN_x layer Using Combination of a Laser Terahertz Emission Microscope (LTEM) and a Corona Discharge

〇Akira Ito¹, Toshimitsu Mochizuki³, Hidetoshi Nakanishi¹, Iwao Kawayama², Masayoshi Tonouchi², Katsuhiko Shirasawa³, Hidetaka Takato³ (1.SCREEN Holdings Co., Ltd., 2.ILE Osaka Univ., 3.FREA, AIST)

Keywords:solar cell, terahertz wave, passivation layer

We measured SiNx/c-Si using laser terahertz emission microscope (LTEM) and corona discharge.
As a result, THz amplitude inverted as corona discharge density was increased at the refractive index of 2.0. However, it was confirmed that THz amplitude did not invert at the refractive index of 2.1. It is considered to be due to the difference in conductivity of SiNx layer. Therefore, we believe that it can be used for evaluation of passivation technology.