11:15 AM - 11:30 AM
△ [5a-A204-9] Evaluation of surface potential of Si with SiNx layer Using Combination of a Laser Terahertz Emission Microscope (LTEM) and a Corona Discharge
Keywords:solar cell, terahertz wave, passivation layer
We measured SiNx/c-Si using laser terahertz emission microscope (LTEM) and corona discharge.
As a result, THz amplitude inverted as corona discharge density was increased at the refractive index of 2.0. However, it was confirmed that THz amplitude did not invert at the refractive index of 2.1. It is considered to be due to the difference in conductivity of SiNx layer. Therefore, we believe that it can be used for evaluation of passivation technology.
As a result, THz amplitude inverted as corona discharge density was increased at the refractive index of 2.0. However, it was confirmed that THz amplitude did not invert at the refractive index of 2.1. It is considered to be due to the difference in conductivity of SiNx layer. Therefore, we believe that it can be used for evaluation of passivation technology.