A study of Kr/O<sub>2</sub> plasma treatment in GeO<sub>2</sub>/Ge structures

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Tue. Sep 5, 2017 9:00 AM - 12:00 PM C11 (Office 1)

Masato Koyama(TOSHIBA), Akio Ohta(Nagoya Univ.)

9:00 AM - 9:15 AM

〇Yui Tada¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Noukou Univ.)

Keywords:semiconductor