A Study for Improvement of GeO<sub>2</sub> Water Absorbency by plasma Nitridization Treatment

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Tue. Sep 5, 2017 9:00 AM - 12:00 PM C11 (Office 1)

Masato Koyama(TOSHIBA), Akio Ohta(Nagoya Univ.)

9:15 AM - 9:30 AM

〇Yosuke Sekiya¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo Univ. of Agri. & Tech.)

Keywords:gate insulator, nitridization, germanium