10:30 AM - 10:45 AM
[5a-S44-6] Study on Organic Thin Film Ablation Using Femtosecond Extreme Ultraviolet Pulses
Keywords:EUV, Ablation, Organi Thin Film
As a next generation EUV sources, ultra-short EUV pulse is the one of the candidates. Such EUV pulse has a high peak power property so we concerned that the material ablation threshold would be lowered. We studied about the ablation of organic thin film using SACLA BL-1 EUV laser. The results of ablation experiment and future prospective will be presented at the conference.