10:00 AM - 10:15 AM
[5a-S44-5] High-Diffraction-Efficiency Wide-Acceptance-Angle Laminar-Type Diffraction Gratings Overcoated with Oxide Films for Boron-K Emission Spectroscopic Measurements
Keywords:soft X-ray, diffraction grating, multilayer
For the purpose of increasing the diffraction efficiency and spectral flux at B-K emission spectra, TiO2 or CeO2 layer is overacted on the surface of soft X-ray laminar-type Ni-coated grating. The calculated optimum film thickness and incident angle are 22.0 nm and 30.2 nm, and 85.262 ° and 84.496 ° for TiO2 and CeO2 gratings, respectively. Experimental results will be presented at the meeting.