The 78th JSAP Autumn Meeting, 2017

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[5p-C11-1~10] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Tue. Sep 5, 2017 1:45 PM - 4:30 PM C11 (Office 1)

Masao Inoue(Renesas), Takanobu Watanabe(Waseda Univ.)

2:30 PM - 2:45 PM

[5p-C11-4] Correlation between Electrical Dipole Moment and Ratio of Oxygen Density at High-k Dielectric/SiO2 Interface as Evaluated by XPS

Nobuyuki Fujimura1, Akio Ohta1, Mitsuhisa Ikeda1, Katsunori Makihara1, Seiichi Miyazaki1 (1.Nagoya Univ.)

Keywords:XPS, electrical dipole moment, high-k/SiO2 interface