Nobuyuki Fujimura

→ Search for Nobuyuki Fujimura in Google Scholar

Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:45 PM - 4:30 PM C11 (Office 1)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[5p-C11-1~10] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

2:30 PM - 2:45 PM

[5p-C11-4] Correlation between Electrical Dipole Moment and Ratio of Oxygen Density at High-k Dielectric/SiO₂ Interface as Evaluated by XPS

〇Nobuyuki Fujimura¹, Akio Ohta¹, Mitsuhisa Ikeda¹, Katsunori Makihara¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)